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Please use this identifier to cite or link to this item: http://hdl.handle.net/123456789/5575

Title: Dépot de nitrure de silicium amorphe hydrogéné par pulvérisation DC magnétron
Authors: Mokeddem, Kamel
Keywords: Nitrures de silicium
Silicium
Pulvérisation
Spectroscopie
Hydrogène
Issue Date: 2017
Description: 121 p. : ill. ; 30 cm (+ CD-Rom)
URI: http://hdl.handle.net/123456789/5575
Appears in Collections:Thèse de Doctorat

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